Optical properties of N2/Ar plasma generated by electron beams with silicon nitride transmission window at high pressures

In this paper, we report the generation of nitrogen/argon electron beam plasmas with a 0.4 μm-thick silicon nitride transmission window. The measured transmittance is about 92% when incident energy 40 keV. optical properties plasma are investigated at high pressures. luminescence intensity distribution nitrogen and argon shows good similarity changing gas pressure, suggesting that ionization independent background gas. At same conical structure has longer length along direction smaller divergence cone angle compared plasma. discharge, it found intensities I380.4, I399.7, I391.4 corresponding to characteristic lines 380.4, 399.7, 391.4 nm decrease beam, which correlated reduction density beam. There no change in ratio I399.7 indicating spatial uniformity temperature. When pressure increases, process induced by primary enhanced, generating more electrons, responding increase line intensity. time, neutral particle collision processes enhanced temperature decreases believed contribute observed I399.7/I380.4 ratio.